The VIISta 810 is a 300 mm medium current ion implanter. It was designed to address the challenges posed by the transition to 300 mm diameter substrates with device line widths below 180 nm.

November 10, 2011 – Applied Materials, Inc. announced the successful completion of its acquisition of Varian Semiconductor Equipment Associates, Inc. 
Varian is the leading supplier of ion implantation equipment used by chip makers and has been applying this technology to crystalline silicon wafers for photovoltaic panels. Varian will operate as a business unit of Applied's Silicon Systems Group.

APPLIED MATERIALS (AMAT) / VARIAN

VIISta  810

Mid Current Implanter
Offline since 2014
Hard Drive not included
Many components are missing, must inspect tool to confirm

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VIISta 810

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