FPA-5500iZ+
Category
I-LineOverview
FPA-5500iZ large-field i-line stepper for lowest CoO on non-critical layers. This high-productivity 365nm step-and-repeat system matches existing KrF/ArF scanner fields (26x33mm) for low-cost rough layer exposure.
Active Listings
5
Services
Inspection, Insurance, Appraisal, Logistics