Description
CVD systemConfiguration
Known issues: Not included: (Qty 2) Eurotherm Temp; TM Robot Blade; (Qty 3) Chuck Heater EFEM with Loadlocks and Buffer Ulvac Covot-6 VAC Robot Handler (Qty 3) FOUP Factory Interface Process: SiON Software Version: GF.2.4.2_100 CIM: SECS (Qty 3) ChambersOEM Model Description
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WONIK IPS
MAHA MP
CATEGORY
Gas Cabinets
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
154812
Wafer Sizes:
12"/300mm
Vintage:
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
CVD systemConfiguration
Known issues: Not included: (Qty 2) Eurotherm Temp; TM Robot Blade; (Qty 3) Chuck Heater EFEM with Loadlocks and Buffer Ulvac Covot-6 VAC Robot Handler (Qty 3) FOUP Factory Interface Process: SiON Software Version: GF.2.4.2_100 CIM: SECS (Qty 3) ChambersOEM Model Description
None ProvidedDocuments
No documents