Description
Tube FurnaceConfiguration
Tube 1: Wet Oxide & drive in SiC Tube Tube 2:Wet Oxide & drive in SiC Tube Tube 3: Wet Oxide flow No Tube 4: Wet Oxide flow NoOEM Model Description
THERMCO 5200 is a diffusion furnace that is part of Thermco’s Model 5200 series. It is configurable from two to four-process chamber systems and can process substrates up to 150 mm in diameter, including Semiconductor, PV, LED, Nano, and MEMS substrates. The 5200 series has a 1,100mm flatzone, which allows for greater wafer processing capacity compared to the 5100 series, which has a 750mm flatzone. The furnace can be interfaced with a wide range of automation solutions and is constructed from cold rolled steel and stainless steel components.Documents
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THERMCO
5200
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
73040
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
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THERMCO
5200
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
73040
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Tube FurnaceConfiguration
Tube 1: Wet Oxide & drive in SiC Tube Tube 2:Wet Oxide & drive in SiC Tube Tube 3: Wet Oxide flow No Tube 4: Wet Oxide flow NoOEM Model Description
THERMCO 5200 is a diffusion furnace that is part of Thermco’s Model 5200 series. It is configurable from two to four-process chamber systems and can process substrates up to 150 mm in diameter, including Semiconductor, PV, LED, Nano, and MEMS substrates. The 5200 series has a 1,100mm flatzone, which allows for greater wafer processing capacity compared to the 5100 series, which has a 750mm flatzone. The furnace can be interfaced with a wide range of automation solutions and is constructed from cold rolled steel and stainless steel components.Documents
No documents