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MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
  • MRL Cyclone 630
Description
dry oxidation at temperatures between 700 -1150°C. Batches of up to 50 wafers (4 to 6”) low pressure chemical vapor deposition (LPCVD) tool used for silicon nitride deposition at temperature between 700-850°C with batches of up to 50 wafers (4 to 6”)
Configuration
MRL Cyclone 630 Configured: 4 to 6" Tube 1: LPCVD Silicon Nitride, used for silicon nitride deposition at temperatures between 700-850°C Tube 2: Dry Oxidation at temperatures between 700 -1150°C Tube 3: N/A Tube 4: N/A
OEM Model Description
None Provided
Documents

No documents

CATEGORY
Furnaces / Diffusion

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

111178


Wafer Sizes:

Unknown


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

MRL

Cyclone 630

verified-listing-icon
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
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Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

111178


Wafer Sizes:

Unknown


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
dry oxidation at temperatures between 700 -1150°C. Batches of up to 50 wafers (4 to 6”) low pressure chemical vapor deposition (LPCVD) tool used for silicon nitride deposition at temperature between 700-850°C with batches of up to 50 wafers (4 to 6”)
Configuration
MRL Cyclone 630 Configured: 4 to 6" Tube 1: LPCVD Silicon Nitride, used for silicon nitride deposition at temperatures between 700-850°C Tube 2: Dry Oxidation at temperatures between 700 -1150°C Tube 3: N/A Tube 4: N/A
OEM Model Description
None Provided
Documents

No documents