Description
Steam Oxidation furnaceConfiguration
No ConfigurationOEM Model Description
VF-3000 Low-Cost Mini Batch Vertical Furnace Features: - Low-cost equipment for back end users - Mini batch, 50 to 75 wafers processing is available for R&D to mass-production line - 4 to 8 inch wafer size is available - Max 4 cassette stocks - Excellent temperature control from low to medium high temperature range using an LGO heater - High-speed wafer transfer using a single wafer handling robot - Equipped with limited-function simple control systemDocuments
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JTEKT Thermo Systems Corporation
VF-3000
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
82076
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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JTEKT Thermo Systems Corporation
VF-3000
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
82076
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Steam Oxidation furnaceConfiguration
No ConfigurationOEM Model Description
VF-3000 Low-Cost Mini Batch Vertical Furnace Features: - Low-cost equipment for back end users - Mini batch, 50 to 75 wafers processing is available for R&D to mass-production line - 4 to 8 inch wafer size is available - Max 4 cassette stocks - Excellent temperature control from low to medium high temperature range using an LGO heater - High-speed wafer transfer using a single wafer handling robot - Equipped with limited-function simple control systemDocuments
No documents