KOKUSAI-ELECTRIC (KE)

DJ 1236VN DF

MISSING PARTS:
(1 set) Quartz wares - process tube, etc.

Software OS: CX5000
Equipment status: Out of Fab
Type: Diffusion
Air valve: FUJIKIN
MFC, MFM: HORIBA STEC
Three phase power: 3Ø AC 480V
Single phase power: 1Ø AC 120V
Main/APC: CKD
Gas: PN2 / SiH4 / PH3		
Others: ROBO 5000

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FVX2487-T - KOKUnited StatesI DJ-1236VN-DF TiN_ALD Process

DJ 1236VN DF

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