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AVP 8200
Category
Furnaces / DiffusionOverview
The AVIZA AVP 8200 is a vertical furnace with precise thermal control ranging from 100 to over 1200°C. It features advanced injector technology, ensuring optimal gas distribution for the epitaxial growth process. Additionally, the furnace is equipped with a low O2 load lock, which helps maintain a controlled environment for wafers and ensures excellent repeatability in the process.
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