Description
Product Description Vertical LPCVD Furnace Software version 6.80C Heater Type MRL Loader configuration, 4 or 5 loader - 4Configuration
Quartzware Configuration Outer tube: Quartz Inner tube: Quartz Boat: SiC boat Boat fix ring/Cap quartz: Quartz Adiabatic plate quantity: 6 Back N2, Qty: N/A BCl3, Qty & Type (L-type, Straight, Diffuser, Shower) N/A SiH4, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) U/D/L O2, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) E PH3, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) U/D/L ClF3, Qty & Type (L-type, Straight, Diffuser, Shower) N/A Vacuum Line configuration Design: original config 10 Torr Baratron model: MKS 10 Torr Baratron full scale setting 10(F/S) 1000 Torr Baratron model MKS 1000 Torr Baratron full scale setting: 1000(F/S) ATM sensor model: MKS Vent Valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger Check valve model Check valve model: Fujikin Check valve resistance pressure: 2.26 Kpa Mainvalve type, Kitz or CKD: MKS Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003) Slow valve orifice size: 2.0mm (PV003) Pressure range of vacuum gauge(Inficon Pirani gauge): 10T Control Table Alarm Watch/Table setting Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)) U: 0.7/0.7/30S CU 0.7/0.7/30S C: 0.7/0.7/30S CL 0.7/0.7/30S L: 0.7/0.7/30S Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)) 0.02/0.02/30S MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)) MFC1: N2: 2%/2%/10sec MFC2: N2: 2%/2%/10sec MFC3 N2: 2%/2%/10sec MFC4: N2: 2%/2%/10sec MFC5 SiH4: 2%/2%/10sec MFC6: SiH4: 2%/2%/10sec MFC7 SiH4: 2%/2%/10sec MFC8; 1%O2/Ar: 1%/1%/10sec MFC9 5%PH3/N2: 2%/2%/10sec MFC10: 5%PH3/N2: 2%/2%/10sec MFC11 5%PH3/N2: 2%/2%/10sec MFC12: ClF3: 10%/10%/10sec MFC13 N/A MFC14:N/A MFC15 N/A MFC16: N/A MFC17 N/A MFC18: N/A MFC19 N/A MFC20: N/A MFC21: N/A APC Valve Action (High (%), Low (%), Time(s)) N/A Transfer Table Wafer Charge command (charge/discharge) Side Dummy Upper:5 / Lower:10 Product 100 Monitor 5 Product & Monitor 105 Time 2nd charge time(min) 0 wafer cool time(min) 20min Leak Rate Table Base pressure low Limit(Torr) 1% Base pressure High Limit(Torr) 1% Leak Check check time(s) 60s Leak Check delay time(s) N/A Leak limit(Torr) 1% Retry Limit(count) 2 Loadlock Settings Loadlock configuration O2 analyser model, NGK or Toray PBI3.1 / PBI4.0 Process L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A Ready L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A Idle L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A L/A O2 check time (min) N/A L/A O2 limit (ppm) 10ppm POD opener O2 limit (ppm) N/A POD O2 check time(min) N/A POD check retry N/AOEM Model Description
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.Documents
No documents
Similar Listings
View All
ASM
A412
CATEGORY
Furnaces / Diffusion
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
117576
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Product Description Vertical LPCVD Furnace Software version 6.80C Heater Type MRL Loader configuration, 4 or 5 loader - 4Configuration
Quartzware Configuration Outer tube: Quartz Inner tube: Quartz Boat: SiC boat Boat fix ring/Cap quartz: Quartz Adiabatic plate quantity: 6 Back N2, Qty: N/A BCl3, Qty & Type (L-type, Straight, Diffuser, Shower) N/A SiH4, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) U/D/L O2, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) E PH3, Qty & Type (L-type, Straight, Diffuser, Shower) Multihole (1) U/D/L ClF3, Qty & Type (L-type, Straight, Diffuser, Shower) N/A Vacuum Line configuration Design: original config 10 Torr Baratron model: MKS 10 Torr Baratron full scale setting 10(F/S) 1000 Torr Baratron model MKS 1000 Torr Baratron full scale setting: 1000(F/S) ATM sensor model: MKS Vent Valve 1 (VV1) normally closed/open,plunger, diaphragm: Normally open,plunger Check valve model Check valve model: Fujikin Check valve resistance pressure: 2.26 Kpa Mainvalve type, Kitz or CKD: MKS Slow valve, incorporated with mainvalve or separate(AV72,AV77): Separate (PV003) Slow valve orifice size: 2.0mm (PV003) Pressure range of vacuum gauge(Inficon Pirani gauge): 10T Control Table Alarm Watch/Table setting Temp (Low Alarm Limit(deg)/High Alarm Limit(deg)/Check Time(min)) U: 0.7/0.7/30S CU 0.7/0.7/30S C: 0.7/0.7/30S CL 0.7/0.7/30S L: 0.7/0.7/30S Pressure (Low Alarm Limit(Torr)/High Alarm Limit(Torr)/Check Time(S)) 0.02/0.02/30S MFC (Low Alarm Limit(%)/High Alarm Limit(%)/Check Time(S)) MFC1: N2: 2%/2%/10sec MFC2: N2: 2%/2%/10sec MFC3 N2: 2%/2%/10sec MFC4: N2: 2%/2%/10sec MFC5 SiH4: 2%/2%/10sec MFC6: SiH4: 2%/2%/10sec MFC7 SiH4: 2%/2%/10sec MFC8; 1%O2/Ar: 1%/1%/10sec MFC9 5%PH3/N2: 2%/2%/10sec MFC10: 5%PH3/N2: 2%/2%/10sec MFC11 5%PH3/N2: 2%/2%/10sec MFC12: ClF3: 10%/10%/10sec MFC13 N/A MFC14:N/A MFC15 N/A MFC16: N/A MFC17 N/A MFC18: N/A MFC19 N/A MFC20: N/A MFC21: N/A APC Valve Action (High (%), Low (%), Time(s)) N/A Transfer Table Wafer Charge command (charge/discharge) Side Dummy Upper:5 / Lower:10 Product 100 Monitor 5 Product & Monitor 105 Time 2nd charge time(min) 0 wafer cool time(min) 20min Leak Rate Table Base pressure low Limit(Torr) 1% Base pressure High Limit(Torr) 1% Leak Check check time(s) 60s Leak Check delay time(s) N/A Leak limit(Torr) 1% Retry Limit(count) 2 Loadlock Settings Loadlock configuration O2 analyser model, NGK or Toray PBI3.1 / PBI4.0 Process L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A Ready L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A Idle L/A Keep Value (ppm) 10ppm N2 Flow max (L) 1300L N2 Flow min (L) 300L Check Stability Time(s) N/A L/A O2 check time (min) N/A L/A O2 limit (ppm) 10ppm POD opener O2 limit (ppm) N/A POD O2 check time(min) N/A POD check retry N/AOEM Model Description
The ASM A412 is a vertical furnace system with a proven track record of more than 1,000 reactors shipped to customers worldwide and over 22 years of maturity in semiconductor manufacturing.Documents
No documents