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Robot Manufacturer/Model: Genmark Controller Manufacturer/Model: Genmark Interface: RS 232 Process Gases: O2, N2OEM Model Description
The ASM AD400 is a diffusion and oxidation furnaces system used in semiconductor manufacturing. It is designed for processing 8-inch wafers with dual tubes or 6-inch wafers with dual boats. The system's body is anodized to resist corrosion, ensuring durability and reliability during wafer processing.Documents
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ASM
A400
CATEGORY
Furnaces / Diffusion
Last Verified: 19 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
143150
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
1996
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Robot Manufacturer/Model: Genmark Controller Manufacturer/Model: Genmark Interface: RS 232 Process Gases: O2, N2OEM Model Description
The ASM AD400 is a diffusion and oxidation furnaces system used in semiconductor manufacturing. It is designed for processing 8-inch wafers with dual tubes or 6-inch wafers with dual boats. The system's body is anodized to resist corrosion, ensuring durability and reliability during wafer processing.Documents
No documents