Verified
Plasma Etch
Last Verified:Over 60 days ago
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Verified
Last Verified:Over 60 days ago
Condition:Used
Operational Status:
Product ID:54216
Wafer Sizes:Unknown
Vintage:Unknown
No description available
No Configuration
The UNITY® Etch System by TEL is a 200mm etching system that has set the industry benchmark for reliability worldwide. The system has undergone several improvements, with the development of the UNITY® II, UNITY® IIe, and most recently the UNITY® M(e). The UNITY® provides a reliable platform for various chambers, utilizing two plasma sources: the DRM (Dipole Ring Magnet), a MERIE source, and the SCCM (Super Capacitively Coupled Module), which applies to dual high-frequency plasma sources. The DRM has been successful in Dielectric and Silicon Deep Trench etch applications, while the newest chamber, SCCM, provides controlled plasma dissociation and independent control of plasma bias. The UNITY® series achieves excellent process performance for the 130 nm design rule and later generations, offering optimal productivity and reliability based on ongoing refinements to a proven platform.
Verified
Last Verified:Over 60 days ago
Condition:Used
Operational Status:
Product ID:54216
Wafer Sizes:Unknown
Vintage:Unknown
No description available
No Configuration
The UNITY® Etch System by TEL is a 200mm etching system that has set the industry benchmark for reliability worldwide. The system has undergone several improvements, with the development of the UNITY® II, UNITY® IIe, and most recently the UNITY® M(e). The UNITY® provides a reliable platform for various chambers, utilizing two plasma sources: the DRM (Dipole Ring Magnet), a MERIE source, and the SCCM (Super Capacitively Coupled Module), which applies to dual high-frequency plasma sources. The DRM has been successful in Dielectric and Silicon Deep Trench etch applications, while the newest chamber, SCCM, provides controlled plasma dissociation and independent control of plasma bias. The UNITY® series achieves excellent process performance for the 130 nm design rule and later generations, offering optimal productivity and reliability based on ongoing refinements to a proven platform.
Moov goes beyond the transaction to ensure a seamless buying experience from start to finish.
Money Back Guarantee
Let Moov take the risk out of purchasing secondhand equipment with our 'No questions asked Money Back Guarantee' Learn more
Logistics
One stop shop for Moov-ing equipment anywhere globally.
Insurance
Moov-ing equipment can be risky. Let us take on that risk so you can relax while your equipment is in transit.
Refurbishment
Need a tool built to the required specifications? Moov's refurbishment team has over 20 years of experience.