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TEL / TOKYO ELECTRON UNITY EP
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    Key Item Details

    Condition:As Is

    Product ID:42661

    Wafer Sizes:8"/200mm

    Vintage:2000

    Description

    No description available

    Configuration

    Metal(Ti/TiN)

    Documents
    No documents
    OEM Model Description

    The TEL / TOKYO ELECTRON UNITY EP etcher is used for chemical vapor deposition. The TEL / TOKYO ELECTRON UNITY EP is compatible with 8" wafer size. Applications for the TEL UNITY EP include chemical vapor deposition (CVD) system is built for CVD metal and metal oxide films, enabling high volume manufacturing of state-of-the-art integrated circuits.

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