Overview

The TEL / TOKYO ELECTRON UNITY is a Etchers & Ashers system. The UNITY can be used with 100/150/200mm wafer sizes. UNITY is TEL’s first original vacuum multi chamber tool. The UNITY was recognized in the prestigious VLSI Customer Satisfaction Survey (1998), as the World Leader in Etch System Performance. Various configurations are offered for wafer sizes from 150 to 300mm.