Description
Sitting idle, less chlorine gasses, and can fired up if need be.Configuration
Gas cabinents, BOSCH pumps, scrubber included EDWARDS ATLAS MK3B, Manual load station, elevated staging, RF generator 30Kilowat Kyosan, 480 volt power Rough throughput 1800 wafers assuming 156mmx156mm uptime >94% Setup for SF6, CL, O2 gases Equipment tray footprint 3500mm x 8750mm x 3620mmOEM Model Description
RIE(Reactive lon Etch) & Manual LoaderDocuments
No documents
WONIK IPS
Helitex AAS0
Verified
CATEGORY
Etch/Asher
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
63639
Wafer Sizes:
Unknown
Vintage:
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
WONIK IPS
Helitex AAS0
CATEGORY
Etch/Asher
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
63639
Wafer Sizes:
Unknown
Vintage:
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Sitting idle, less chlorine gasses, and can fired up if need be.Configuration
Gas cabinents, BOSCH pumps, scrubber included EDWARDS ATLAS MK3B, Manual load station, elevated staging, RF generator 30Kilowat Kyosan, 480 volt power Rough throughput 1800 wafers assuming 156mmx156mm uptime >94% Setup for SF6, CL, O2 gases Equipment tray footprint 3500mm x 8750mm x 3620mmOEM Model Description
RIE(Reactive lon Etch) & Manual LoaderDocuments
No documents