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WONIK IPS Helitex AAS0

Description

Sitting idle, less chlorine gasses, and can fired up if need be.

Configuration

Gas cabinents, BOSCH pumps, scrubber included EDWARDS ATLAS MK3B, Manual load station, elevated staging, RF generator 30Kilowat Kyosan, 480 volt power Rough throughput 1800 wafers assuming 156mmx156mm uptime >94% Setup for SF6, CL, O2 gases Equipment tray footprint 3500mm x 8750mm x 3620mm

OEM Model Description

RIE(Reactive lon Etch) & Manual Loader

Documents

No documents

WONIK IPS

Helitex AAS0

Verified

CATEGORY

Etch/Asher

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

63639

Wafer Sizes:

Unknown

Vintage:

2014

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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verified-listing-icon

Verified

CATEGORY

Etch/Asher

Last Verified: Over 60 days ago

listing-photo-745b126dc3f742b4bdef58fe00a8d443-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/48030/745b126dc3f742b4bdef58fe00a8d443/967d7bff92994ff3ab90ae8d2fa02c89_bc920398aaff40ad96b4dd6e167745cc1201a_mw.jpeg

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

63639

Wafer Sizes:

Unknown

Vintage:

2014

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

Sitting idle, less chlorine gasses, and can fired up if need be.

Configuration

Gas cabinents, BOSCH pumps, scrubber included EDWARDS ATLAS MK3B, Manual load station, elevated staging, RF generator 30Kilowat Kyosan, 480 volt power Rough throughput 1800 wafers assuming 156mmx156mm uptime >94% Setup for SF6, CL, O2 gases Equipment tray footprint 3500mm x 8750mm x 3620mm

OEM Model Description

RIE(Reactive lon Etch) & Manual Loader

Documents

No documents

Similar Listings

WONIK IPS Helitex AAS0

WONIK IPS

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Etch/AsherVintage: 2014Condition: UsedLast Verified:Over 60 days ago

WONIK IPS Helitex AAS0

WONIK IPS

Helitex AAS0

Etch/AsherVintage: 2017Condition: UsedLast Verified:Over 60 days ago