Description
No descriptionConfiguration
SPTS MPX ICP SR ETCHER consisting of: - Model: MPX ICP - Process: SiC, III-V, or Metal Etch - Single process chamber with manually loaded vacuum loadlock, with carousel wafer handler 2 wafers - Inductively Coupled Plasma Source (ICP) - Currently Configured for 4"/100mm Wafers - Capable of processing up to 8"/200mm wafers - Carousel Load Lock (2-Wafer Carousel) - Heated Lower Chamber - Load-Lock Chamber - Helium Substrate Backside Cooling - Weighted Clamp - ESR20N Vacuum Pump (Chamber) - Alcatel Adixen ACP 40 Vacuum Pump (Load Lock) - SMC Thermco Chiller - E-Rack - MKS Spectrum 3KW 13.56MHz RF Generator (Source) - 13.56MHz RF Generator (Lower Electrode) - Leybold MAG 1500CT Turbo Pump - System Cables (full set) - SPTS System Software - Verity Instruments End Point Detector - User Manuals & Documentation - Year of Manufacture: 2007 - Serial Number: MPO582 On Board Gas Box with Following Gas Configuration: - O2 @ 50 SCCM - C4F8 @ 200 SCCM - SF6 @ 200 - Ar @ 200 SCCM - He @ 200 SCCM - CF4 @ 200 SCCM - CHF3 @ 200 SCCM - NF3 @ 200 SCCM FULLY REFURBISHED SYSTEM MEETING ORIGINAL SPECIFICATIONS: - Chamber disassembled for refurbishment. - Chamber received full wet clean. - Chamber o-rings and seals are replaced with brand new. - Electrostatic Chuck (ESC) sent out for refurbishment (if applicable) - All MFCs rebuilt and calibrated professionally. - All corrosive gas lines replaced with brand new. - All Non-corrosive gas lines purged. - Vacuum pumps professionally rebuilt. - Turbo pump professionally rebuilt. - Chillers serviced and fully tested. - All wiring/wire harnesses are checked, repaired or replaced if needed. - All liquid and air lines, tubing and fittings checked and replaced if necessary. - Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed. - Checkout of all electronic and mechanical parts. - Machine covers are cleaned, polished or replaced as needed. - Post-refurbishment system leak and RF calibration checks, with documentation provided to customer. - System cycle and repeatability testing completed prior to cover replacement and wipe down. - A software license may be obtained directly from SPTS - SPTS does not certify any third party equipment refurbishments - System components carefully packed, labeled, and professionally crated.OEM Model Description
MultiPlex ICPDocuments
No documents
KLA / SPTS
MPX ICP
Verified
CATEGORY
Etch/Asher
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
17005
Wafer Sizes:
8"/200mm
Vintage:
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
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KLA / SPTS
MPX ICP
Verified
CATEGORY
Etch/Asher
Last Verified: 30 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
17005
Wafer Sizes:
8"/200mm
Vintage:
2007
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
SPTS MPX ICP SR ETCHER consisting of: - Model: MPX ICP - Process: SiC, III-V, or Metal Etch - Single process chamber with manually loaded vacuum loadlock, with carousel wafer handler 2 wafers - Inductively Coupled Plasma Source (ICP) - Currently Configured for 4"/100mm Wafers - Capable of processing up to 8"/200mm wafers - Carousel Load Lock (2-Wafer Carousel) - Heated Lower Chamber - Load-Lock Chamber - Helium Substrate Backside Cooling - Weighted Clamp - ESR20N Vacuum Pump (Chamber) - Alcatel Adixen ACP 40 Vacuum Pump (Load Lock) - SMC Thermco Chiller - E-Rack - MKS Spectrum 3KW 13.56MHz RF Generator (Source) - 13.56MHz RF Generator (Lower Electrode) - Leybold MAG 1500CT Turbo Pump - System Cables (full set) - SPTS System Software - Verity Instruments End Point Detector - User Manuals & Documentation - Year of Manufacture: 2007 - Serial Number: MPO582 On Board Gas Box with Following Gas Configuration: - O2 @ 50 SCCM - C4F8 @ 200 SCCM - SF6 @ 200 - Ar @ 200 SCCM - He @ 200 SCCM - CF4 @ 200 SCCM - CHF3 @ 200 SCCM - NF3 @ 200 SCCM FULLY REFURBISHED SYSTEM MEETING ORIGINAL SPECIFICATIONS: - Chamber disassembled for refurbishment. - Chamber received full wet clean. - Chamber o-rings and seals are replaced with brand new. - Electrostatic Chuck (ESC) sent out for refurbishment (if applicable) - All MFCs rebuilt and calibrated professionally. - All corrosive gas lines replaced with brand new. - All Non-corrosive gas lines purged. - Vacuum pumps professionally rebuilt. - Turbo pump professionally rebuilt. - Chillers serviced and fully tested. - All wiring/wire harnesses are checked, repaired or replaced if needed. - All liquid and air lines, tubing and fittings checked and replaced if necessary. - Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed. - Checkout of all electronic and mechanical parts. - Machine covers are cleaned, polished or replaced as needed. - Post-refurbishment system leak and RF calibration checks, with documentation provided to customer. - System cycle and repeatability testing completed prior to cover replacement and wipe down. - A software license may be obtained directly from SPTS - SPTS does not certify any third party equipment refurbishments - System components carefully packed, labeled, and professionally crated.OEM Model Description
MultiPlex ICPDocuments
No documents
Similar Listings
View AllNo Similar Listings