Nordson MARCH was formed through the merging of March Instruments of Concord, California, USA and Advanced Plasma Systems (APS) of St. Petersburg, Florida, USA. The company was acquired in 1999 by Nordson Corporation and referred to as March Plasma Systems until renamed Nordson MARCH in 2009.

https://www.nordson.com/en/divisions/march

NORDSON / MARCH

PM-600

Plasma Cleaner

Plasma System

•Uniform PCB treatment for desmear, landing pad cleaning, and etchback for HDI and flexible and rigid circuit board applications.

• Low CF4 gas consumption for desmear applications, contributes to the lowest cost of ownership in its class.

• Unique vacuum and gas flow technology, advanced electrode designs, and superior temperature management.

• Provides front and rear system access to all interior components for convenient service. The pump is positioned on rollers for easy
removal, and side access is not required.

MaxVIA

PCB-1600

CS-1791

PX-2400

PM-100

ITRACK-XL

MaxVIA-PLUS

Plasma System
Plasma Cleaner

Plasma treatment with its large chamber for batch-type plasma processing.

AP-1500

PCB-400

PROVIA-LVD

The AP-300™ plasma system delivers exceptionally uniform plasma cleaning and treatment for semiconductor, microelectronic packaging and assembly, and medical device manufacturing.

AP-300

Plasma System 
Plasma Cleaning for wafers. 

Processing of 3D and wafer-level packaging processes such as fan-in, fan-out, wafer-level, and panel-level - handling wafers up to 450mm and panels up to 480mm. 

MesoSPHERE

StratoSPHERE

Plasma System

Plasma cleaning and treatment for semiconductor, microelectronic packaging and assembly, and medical device manufacturing.

• Plasma cleaning
• Surface activation
• Adhesion improvement



AP-600

PCB-800

AP Series

Plasma System 

Plasma Cleaner

Provides gold plasma processing.

The pump, chamber, control electronics and 13.56MHz power supply are housed in one body

AP-1000

PX-1000

RIE Plasma System 
Legacy/Archived tool. 
Reactive Ion Etching system 

CS-1701

Plasma Treatment System 
Legacy/Archived 

PX-250

PX-500

ProVIA

PX-1000E8

The March Jupiter III is a parallel plate reactive ion etcher, which offers fast, uniform, and selective etching. The Jupiter III is typically used for wafer descumming and ashing. The maximum sample size is 6 inches. The system is equipped with a maximum 300W RF power supply. The available process gases are oxygen, argon, and forming gas which are adjustable using a rotameter.

Jupiter III

Plasma Treatment System
The XTRAK provides maximum performance and flexibility for surface treatment of electronic devices. With its innovative handling system, the XTRAK is ideal for applications such as adhesion promotion and contamination removal in a highly automated, in-line manufacturing operation or island configuration.

NORDSON / MARCH

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Top NORDSON / MARCH Etch/Asher

StratoSPHERE

PCB-1600

MaxVIA

CS-1791

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