Description
• Versatile ICP etcher to anisotropically etch most thin film material(s) • Two 5kW 2.45GHz microwave power supplies coupled to 4 independent wave guides deliver high-density free radicals for a gentle chemical etch. • 13.56 MHz power supply powers the cathode to provides bias for anisotropy • Manual load: (3) 6' wafers onto the carrier. then into UL • L/L & process chamber equipped with roughing pump and turbo • Process gases: BC. Cl2. CF4, SF6, C4Fs, 02. & ArConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
Etch/Asher
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
135817
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
MEYER BURGER
AP 800
CATEGORY
Etch/Asher
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
135817
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
• Versatile ICP etcher to anisotropically etch most thin film material(s) • Two 5kW 2.45GHz microwave power supplies coupled to 4 independent wave guides deliver high-density free radicals for a gentle chemical etch. • 13.56 MHz power supply powers the cathode to provides bias for anisotropy • Manual load: (3) 6' wafers onto the carrier. then into UL • L/L & process chamber equipped with roughing pump and turbo • Process gases: BC. Cl2. CF4, SF6, C4Fs, 02. & ArConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents