
Description
moderate density RIE and uwave; can be used as etch and dep in same chamber config, multi-materialConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
Etch/Asher
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
128839
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
MEYER BURGER
AK800
CATEGORY
Etch/Asher
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
128839
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
moderate density RIE and uwave; can be used as etch and dep in same chamber config, multi-materialConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents