
Description
Remaining parts for tool1: Transfer robot Missing parts for tool 1: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer 4.EC&AC magnetron generator 5.EC turbo pump & controller 6.LL/UL cassette motor 7.AC gate cylinder Remaining parts for tool 2: 1.Transfer robot 2.LL system 3.EC chamber system 4.AC chamber system Missing parts for tool 2: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computerConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
HITACHI
M 308AE
CATEGORY
Etch/Asher
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
133660
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Remaining parts for tool1: Transfer robot Missing parts for tool 1: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer 4.EC&AC magnetron generator 5.EC turbo pump & controller 6.LL/UL cassette motor 7.AC gate cylinder Remaining parts for tool 2: 1.Transfer robot 2.LL system 3.EC chamber system 4.AC chamber system Missing parts for tool 2: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computerConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents