Description
EPI ReactorsConfiguration
Epitaxial Reactor PE106 Argon Line H2 Line SiHCI3 (Silicon Source) with Bubbler and thermal controller N Type Dope Line C2H4 (Etylene Carbon Source) Box Description: 1. nr. 1 Carriage Module 2. nr. 1 Reactor Module 3. nr. 1 Power generator 4. nr. 1 Trolley for PC nr. 2 UPS nr. 1 PC + Monitor nr. 1Coaxial cables nr. 1 Accessories nr. Panel reactor 5. nr. 1 set of quartz/graphite pieces Reactor 6. nr. 1 Process Pump EB ara 7. nr. 1 Bubbler STD cod.16G702/R-3061 8. nr. 1 Thermochiller 9. nr. 1 Reaction chamber 10. nr. Cabinet BubblerOEM Model Description
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LPE
PE106A
CATEGORY
Epitaxial deposition (EPI)
Last Verified: 14 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
143536
Wafer Sizes:
Unknown
Vintage:
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
EPI ReactorsConfiguration
Epitaxial Reactor PE106 Argon Line H2 Line SiHCI3 (Silicon Source) with Bubbler and thermal controller N Type Dope Line C2H4 (Etylene Carbon Source) Box Description: 1. nr. 1 Carriage Module 2. nr. 1 Reactor Module 3. nr. 1 Power generator 4. nr. 1 Trolley for PC nr. 2 UPS nr. 1 PC + Monitor nr. 1Coaxial cables nr. 1 Accessories nr. Panel reactor 5. nr. 1 set of quartz/graphite pieces Reactor 6. nr. 1 Process Pump EB ara 7. nr. 1 Bubbler STD cod.16G702/R-3061 8. nr. 1 Thermochiller 9. nr. 1 Reaction chamber 10. nr. Cabinet BubblerOEM Model Description
None ProvidedDocuments
No documents