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6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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TRION TITAN
    Description
    Pumps and chiller not included. Items needed to be replaced: Robot arm belts Drive motor Extension motor
    Configuration
    System Features: PLC and touch screen control, 8" inch chuck Active substrate temperature control Vacuum Cassette Elevator System: TITAN TRION (Up to 8") Wafer: 3" (3 Inch wafers) using 8" Pallet loading (3 wafers per pallet) Load/Lock: 5 wafer slots Pump: BUSCH Transfer Chamber : will re-install robot assembly Robot Controller: Advantech controller Controller: BOC Controller Inert Gas Box MFC CF4 100 sccm MKS O2 50 sccm MKS Ar 50 sccm MKS CHF3 50 sccm MKS N2 100 sccm MKS Toxic Gas Box = BCL3 50 sccm MKS CL2 50 sccm MKS SICL4 50 sccm MKS
    OEM Model Description
    Vacuum loadlocked plasma system
    Documents
    File icon

    TRION TITAN.pdf

    TRION

    TITAN

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: Over 60 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    63718

    Wafer Sizes:

    3"/75mm, 6"/150mm, 8"/200mm

    Vintage:

    Unknown

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    TRION TITAN

    TRION

    TITAN

    Dry / Plasma Etch
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    TRION

    TITAN

    verified-listing-icon
    Verified
    CATEGORY
    Dry / Plasma Etch
    Last Verified: Over 60 days ago
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/7a2621d1737441788dc7c91a0b351e44_ad44ce76306d4dd492270e1d08dee43045005c_mw.jpeg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/d66a235490104a4d9414b6e970a59ad6_0bc2f2a817fa4491b23ecddad501092645005c_mw.jpeg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/257671f6c3ad4078b065ef9f967ac15e_055178a9bcdb4108a16f4d7d97bc23fa45005c_mw.jpeg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/045bff4815d24002b1a5eaf6f9e4acb9_20240605141247_mw.jpg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/1c5a4553539c4ec69103ad58a8f689ed_trioncham1_mw.jpeg
    listing-photo-ebeadfb60cbc4559b5f43416c591d76b-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/9794/ebeadfb60cbc4559b5f43416c591d76b/101ae6ed36794ceca27351e2573945f0_trioncham2_mw.jpeg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    63718

    Wafer Sizes:

    3"/75mm, 6"/150mm, 8"/200mm

    Vintage:

    Unknown

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Pumps and chiller not included. Items needed to be replaced: Robot arm belts Drive motor Extension motor
    Configuration
    System Features: PLC and touch screen control, 8" inch chuck Active substrate temperature control Vacuum Cassette Elevator System: TITAN TRION (Up to 8") Wafer: 3" (3 Inch wafers) using 8" Pallet loading (3 wafers per pallet) Load/Lock: 5 wafer slots Pump: BUSCH Transfer Chamber : will re-install robot assembly Robot Controller: Advantech controller Controller: BOC Controller Inert Gas Box MFC CF4 100 sccm MKS O2 50 sccm MKS Ar 50 sccm MKS CHF3 50 sccm MKS N2 100 sccm MKS Toxic Gas Box = BCL3 50 sccm MKS CL2 50 sccm MKS SICL4 50 sccm MKS
    OEM Model Description
    Vacuum loadlocked plasma system
    Documents
    File icon

    TRION TITAN.pdf

    Similar Listings
    View All
    TRION TITAN

    TRION

    TITAN

    Dry / Plasma EtchVintage: 0Condition: UsedLast Verified:Over 60 days ago