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Description
Pumps and chiller not included. Items needed to be replaced: Robot arm belts Drive motor Extension motorConfiguration
System Features: PLC and touch screen control, 8" inch chuck Active substrate temperature control Vacuum Cassette Elevator System: TITAN TRION (Up to 8") Wafer: 3" (3 Inch wafers) using 8" Pallet loading (3 wafers per pallet) Load/Lock: 5 wafer slots Pump: BUSCH Transfer Chamber : will re-install robot assembly Robot Controller: Advantech controller Controller: BOC Controller Inert Gas Box MFC CF4 100 sccm MKS O2 50 sccm MKS Ar 50 sccm MKS CHF3 50 sccm MKS N2 100 sccm MKS Toxic Gas Box = BCL3 50 sccm MKS CL2 50 sccm MKS SICL4 50 sccm MKSOEM Model Description
Vacuum loadlocked plasma systemDocuments
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
63718
Wafer Sizes:
3"/75mm, 6"/150mm, 8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TRION
TITAN
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
63718
Wafer Sizes:
3"/75mm, 6"/150mm, 8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available