
Description
TRION PHANTOM RIE (Upgradable to MINILOCK RIE) Installed and running Chiller includedConfiguration
Can hold up to an 8" wafer Gasses: SF6, CF4, O2 Windows 3.1 Automatic temp control unit Vacuum Load Lock Down stream upgradeOEM Model Description
None ProvidedDocuments
No documents
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 12 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
141653
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TRION
PHANTOM II
CATEGORY
Dry / Plasma Etch
Last Verified: 12 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
141653
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
1994
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
TRION PHANTOM RIE (Upgradable to MINILOCK RIE) Installed and running Chiller includedConfiguration
Can hold up to an 8" wafer Gasses: SF6, CF4, O2 Windows 3.1 Automatic temp control unit Vacuum Load Lock Down stream upgradeOEM Model Description
None ProvidedDocuments
No documents