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6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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TRION MINILOCK
    Description
    RIE Single Wafer Plasma Metal Etcher 8” (dia.) Chuck RFX-600 RF Generator, 13.56 MHz Automatic RF Matching Network Vacuum Loadlock 4ea Mass Flow Controllers 100 sccm O2 100 sccm CF4 50 sccm Cl2 100 sccm BCl3 PC Process Controller Color Touch Screen Graphical User Interface
    Configuration
    No Configuration
    OEM Model Description
    The Minilock system incorporates a vacuum load-lock in a compact table top console. The system has been designed to meet all the safety and equipment needs for the more challenging processes in the laboratory environment. Its modular design and optional gas cabinet provide the user with a turnkey system that meets your safety, facility and processing needs. The Minilock is suitable for anisotropic etching of aluminum, silicides, gallium arsenide and other materials requiring chlorinated chemistries. It is also suitable for anisotropic etching of silicon dioxide, silicon nitride and other materials requiring high selectivity and a controlled anisotropic etch. The system specifications are 35"Wx26"Dx48"H with RF Power of 600 watt, 13.56 MHz and up to 6 Mass Flow Controllers. The maximum wafer size is up to 8".
    Documents

    No documents

    TRION

    MINILOCK

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    12010


    Wafer Sizes:

    8"/200mm


    Vintage:

    1995


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    TRION MINILOCK

    TRION

    MINILOCK

    Dry / Plasma Etch
    Vintage: 1995Condition: Used
    Last VerifiedOver 60 days ago

    TRION

    MINILOCK

    verified-listing-icon
    Verified
    CATEGORY
    Dry / Plasma Etch
    Last Verified: Over 60 days ago
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/PjfY6G99W3yj5XeyZkMDlr_GOXV9JYbfKnfiCDzI4Zw_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/W3g31xiEUEyTlDKAVQzCq1A-q8De8OOsSE2f7CuyCkE_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/w94r2jiHnVhsgsqF0sr1tUYpaVex_fWnaRJFjHp-3OU_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/VOx47fda_If0GnyLNM4Kz8itWGU4Rznc8zbW6wvYDTM_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/UAmTbyoCMHyptIhUwRACs8KXtqTS0144tjkILCch5zQ_20190315_091716_f
    listing-photo-0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/0G_BNao6seyXb7HN91_jLBRYnuWDGjatlztu6t5LswU/nZgRrZV4KF3kUL5aH-u2BjZqbao1dAf4E_Olr4pbeY8_20190315_091716_f
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    12010


    Wafer Sizes:

    8"/200mm


    Vintage:

    1995


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    RIE Single Wafer Plasma Metal Etcher 8” (dia.) Chuck RFX-600 RF Generator, 13.56 MHz Automatic RF Matching Network Vacuum Loadlock 4ea Mass Flow Controllers 100 sccm O2 100 sccm CF4 50 sccm Cl2 100 sccm BCl3 PC Process Controller Color Touch Screen Graphical User Interface
    Configuration
    No Configuration
    OEM Model Description
    The Minilock system incorporates a vacuum load-lock in a compact table top console. The system has been designed to meet all the safety and equipment needs for the more challenging processes in the laboratory environment. Its modular design and optional gas cabinet provide the user with a turnkey system that meets your safety, facility and processing needs. The Minilock is suitable for anisotropic etching of aluminum, silicides, gallium arsenide and other materials requiring chlorinated chemistries. It is also suitable for anisotropic etching of silicon dioxide, silicon nitride and other materials requiring high selectivity and a controlled anisotropic etch. The system specifications are 35"Wx26"Dx48"H with RF Power of 600 watt, 13.56 MHz and up to 6 Mass Flow Controllers. The maximum wafer size is up to 8".
    Documents

    No documents

    Similar Listings
    View All
    TRION MINILOCK

    TRION

    MINILOCK

    Dry / Plasma EtchVintage: 1995Condition: UsedLast Verified:Over 60 days ago