Description
No descriptionConfiguration
Software Version V5.80c CIM E84, SECS/GEM, GEM300, Interface A Process ETC_GatePatterning Main System TACTRUS NCCP 1 OK Handler System Vacuum Transfer Module 1 OK Handler System Loader Module 1 OK Handler System Loadlock Module 1 OK Factory Interface FOUP 5 OK RF Generators 4 OK AC Power Rack 1 OK Pump Rack 1 OK Pumps 4 OK Chillers 4 OKOEM Model Description
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TEL / TOKYO ELECTRON
TACTRUS NCCP
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
106074
Wafer Sizes:
12"/300mm
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
TACTRUS NCCP
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
106074
Wafer Sizes:
12"/300mm
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Software Version V5.80c CIM E84, SECS/GEM, GEM300, Interface A Process ETC_GatePatterning Main System TACTRUS NCCP 1 OK Handler System Vacuum Transfer Module 1 OK Handler System Loader Module 1 OK Handler System Loadlock Module 1 OK Factory Interface FOUP 5 OK RF Generators 4 OK AC Power Rack 1 OK Pump Rack 1 OK Pumps 4 OK Chillers 4 OKOEM Model Description
None ProvidedDocuments
No documents