Description
It’s a legendary tool for Deep Si Etch from STS/SPTS Best tool for Deep Si etch in MEMS , Advance Package , TSV in compare with Rapier/SPTS , LAM & AMEC by far. SOI kit option included.Configuration
Wafer Size: 200mm Chamber Quantity: 2 Chambers Volts / Hz/Ph: 380 Volts/60Hz ,160 Amps/phaseOEM Model Description
None ProvidedDocuments
STS
CPX Pegasus
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
109365
Wafer Sizes:
8"/200mm
Vintage:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
STS
CPX Pegasus
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Refurbished
Operational Status:
Unknown
Product ID:
109365
Wafer Sizes:
8"/200mm
Vintage:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available