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Description
Reactive Ion Etcher. Good Condition. -Deinstalled, warehoused. -In working condition -Manual loading -includes PC control system -includes manuals -includes Leybold mechanical pump -includes Leybold turbo pump -Leybold turbo pump controller type: Turbotronix NT 151 / 361Configuration
-Cathode diameter: 30 cm -Cathode area: 706.5 cm2 -RF forward power range: 10 to 600 watts -Chamber max pressure: 500 mtorr -Substrate sizes: 2 to 8 inch and small fragments -Number of gas lines available: 8OEM Model Description
None ProvidedDocuments
No documents
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
28956
Wafer Sizes:
8"/200mm
Vintage:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
STS
320 PC
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
28956
Wafer Sizes:
8"/200mm
Vintage:
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Reactive Ion Etcher. Good Condition. -Deinstalled, warehoused. -In working condition -Manual loading -includes PC control system -includes manuals -includes Leybold mechanical pump -includes Leybold turbo pump -Leybold turbo pump controller type: Turbotronix NT 151 / 361Configuration
-Cathode diameter: 30 cm -Cathode area: 706.5 cm2 -RF forward power range: 10 to 600 watts -Chamber max pressure: 500 mtorr -Substrate sizes: 2 to 8 inch and small fragments -Number of gas lines available: 8OEM Model Description
None ProvidedDocuments
No documents