Description
Vapor hydrogen fluoride (VHF) etch system De-installed, in working condition when taken offlineConfiguration
SPTS PRIMAXX MONARCH 25 Omega c2L Platform (up to 4 process modules) Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEM Model Description
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume productionDocuments
No documents
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116047
Wafer Sizes:
Unknown
Vintage:
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
PRIMAXX MONARCH 25
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116047
Wafer Sizes:
Unknown
Vintage:
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Vapor hydrogen fluoride (VHF) etch system De-installed, in working condition when taken offlineConfiguration
SPTS PRIMAXX MONARCH 25 Omega c2L Platform (up to 4 process modules) Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEM Model Description
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume productionDocuments
No documents