
Description
-Stand-alone HF vapor etcher Details AttachedConfiguration
No ConfigurationOEM Model Description
SPTS's uEtch is a single-wafer system specifically designed for university and small research laboratories. Can process single whole wafers (100-200mm) or die on a carrier HF vapor processes are transferable to SPTS 3- and 25-wafer production systems, offering a path from concept to productionDocuments
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
138021
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
PRIMAXX uETCH
CATEGORY
Dry / Plasma Etch
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
138021
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available