Description
SPTS Synapse Chamber SPTS Synapse PM. Includes all the necessary components (gas panel, Rf generators, chiller, etc) to install on a new mainframe. It does not come with the dry pump.Configuration
The gases are SF6, H2, CHF3, CF4, C4F8, He and O2. Powered on, in idle mode The ESC was replaced in 2025.OEM Model Description
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.Documents
No documents
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: 5 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
146034
Wafer Sizes:
Unknown
Vintage:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
OMEGA SYNAPSE
CATEGORY
Dry / Plasma Etch
Last Verified: 5 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
146034
Wafer Sizes:
Unknown
Vintage:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
SPTS Synapse Chamber SPTS Synapse PM. Includes all the necessary components (gas panel, Rf generators, chiller, etc) to install on a new mainframe. It does not come with the dry pump.Configuration
The gases are SF6, H2, CHF3, CF4, C4F8, He and O2. Powered on, in idle mode The ESC was replaced in 2025.OEM Model Description
Omega Synapse etch process module uses a high density plasma source and is designed to etch strongly bonded materials.Documents
No documents