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KLA / SPTS XACTIX CVE
    Description
    The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.
    Configuration
    Vacuum Pump and Chiller Included
    OEM Model Description
    The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.
    Documents

    No documents

    KLA / SPTS

    XACTIX CVE

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: 25 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Deinstalled / Crated

    Product ID:

    123899

    Wafer Sizes:

    8"/200mm

    Chiller:
    HCE-002
    Pumps:
    Kashiyama
    HDD / Software:
    No
    Vintage:

    2018

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    KLA / SPTS XACTIX CVE

    KLA / SPTS

    XACTIX CVE

    Dry / Plasma Etch
    Vintage: 2018Condition: Used
    Last Verified25 days ago

    KLA / SPTS

    XACTIX CVE

    verified-listing-icon
    Verified
    CATEGORY
    Dry / Plasma Etch
    Last Verified: 25 days ago
    listing-photo-58c76a44229c4760a4766cd473e7d722-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/87901/58c76a44229c4760a4766cd473e7d722/c744984742f54daa95bc59abaeba9dc5_xactiximage1_mw.jpeg
    listing-photo-58c76a44229c4760a4766cd473e7d722-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/87901/58c76a44229c4760a4766cd473e7d722/07378dbf13c34c80b1334de997d3f80b_xactiximage2_mw.jpeg
    listing-photo-58c76a44229c4760a4766cd473e7d722-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/87901/58c76a44229c4760a4766cd473e7d722/11714933718d4c498f2fc500a018b1ff_xactixchiller_mw.png
    Key Item Details
    Condition:

    Used

    Operational Status:

    Deinstalled / Crated

    Product ID:

    123899

    Wafer Sizes:

    8"/200mm

    Chiller:
    HCE-002
    Pumps:
    Kashiyama
    HDD / Software:
    No
    Vintage:

    2018

    Logistics Support
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.
    Configuration
    Vacuum Pump and Chiller Included
    OEM Model Description
    The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.
    Documents

    No documents

    Similar Listings
    View All
    KLA / SPTS XACTIX CVE

    KLA / SPTS

    XACTIX CVE

    Dry / Plasma EtchVintage: 2018Condition: UsedLast Verified:25 days ago