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KLA / SPTS XACTIX CVE
  • KLA / SPTS XACTIX CVE
  • KLA / SPTS XACTIX CVE
  • KLA / SPTS XACTIX CVE
Description
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.
Configuration
No Configuration
OEM Model Description
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.
Documents

No documents

PREFERRED
 
SELLER
CATEGORY
Dry / Plasma Etch

Last Verified: Over 30 days ago

Buyer pays 12% premium of final sale price
Key Item Details

Condition:

Used


Operational Status:

Deinstalled / Crated


Product ID:

123899


Wafer Sizes:

8"/200mm


Chiller:
HCE-002

Pumps:
Kashiyama

HDD / Software:
No

Vintage:

2018


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PREFERRED
 
SELLER

KLA / SPTS

XACTIX CVE

verified-listing-icon
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 30 days ago
listing-photo-58c76a44229c4760a4766cd473e7d722-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/87901/58c76a44229c4760a4766cd473e7d722/c744984742f54daa95bc59abaeba9dc5_xactiximage1_mw.jpeg
listing-photo-58c76a44229c4760a4766cd473e7d722-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/87901/58c76a44229c4760a4766cd473e7d722/07378dbf13c34c80b1334de997d3f80b_xactiximage2_mw.jpeg
listing-photo-58c76a44229c4760a4766cd473e7d722-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/87901/58c76a44229c4760a4766cd473e7d722/11714933718d4c498f2fc500a018b1ff_xactixchiller_mw.png
Buyer pays 12% premium of final sale price
Key Item Details

Condition:

Used


Operational Status:

Deinstalled / Crated


Product ID:

123899


Wafer Sizes:

8"/200mm


Chiller:
HCE-002

Pumps:
Kashiyama

HDD / Software:
No

Vintage:

2018


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.
Configuration
No Configuration
OEM Model Description
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.
Documents

No documents