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Description
Type: Plasma Dry etcher Version: 200 mmConfiguration
Gases used:Ar, BCl3, Cl2, HBr, He, N2, O2, SF6OEM Model Description
The Omega Etch Systems from SPTS offers advanced etch technologies for a wide range of applications within Advanced Packaging, MEMS, Photonics, Power Devices, and RF-IC.Documents
No documents
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
53024
Wafer Sizes:
8"/200mm
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA / SPTS
OMEGA 201
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Parts Tool
Operational Status:
Unknown
Product ID:
53024
Wafer Sizes:
8"/200mm
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Type: Plasma Dry etcher Version: 200 mmConfiguration
Gases used:Ar, BCl3, Cl2, HBr, He, N2, O2, SF6OEM Model Description
The Omega Etch Systems from SPTS offers advanced etch technologies for a wide range of applications within Advanced Packaging, MEMS, Photonics, Power Devices, and RF-IC.Documents
No documents