We value your privacy
We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. Read More
APEX SLR
Category
Dry / Plasma EtchOverview
Apex SLR: ICP-Etch -Ideal for small volume production and R&D. Small footprint design -Load lock method, manual load specification -Adopts 2MHz ICP source. Improved etching rate and uniformity with high-density plasma -ICP source section can be opened and closed 90 degrees for easy access to the lower electrode, and equipped with a slide mechanism for easy turbo pump replacement. -Independent control of plasma density and bias possible -Compatible with chlorine-based etching applications -Compatible with various end point detection methods
Active Listings
0
Services
Inspection, Insurance, Appraisal, Logistics
Top Listings
- No products found