2300 EXELAN
Category
Dry / Plasma EtchOverview
The 2300 Exelan is a dielectric etch system introduced in November 2000, designed to process both 200mm and 300mm wafers. It combines Dual Frequency Confined™ (DFC™) plasma technology with state-of-the-art chamber design to provide advanced process performance for copper conductive lines creation, latest generation insulating films, and high aspect ratio applications. It features the industry’s largest dielectric etch portfolio and is capable of meeting the challenges of new materials and reduced geometries at the 130nm technology node and below.
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LAM RESEARCH CORPORATION
2300 EXELAN
Dry / Plasma EtchVintage: Condition: UsedLast VerifiedOver 60 days agoLAM RESEARCH CORPORATION
2300 EXELAN
Dry / Plasma EtchVintage: 2005Condition: UsedLast VerifiedYesterdayLAM RESEARCH CORPORATION
2300 EXELAN
Dry / Plasma EtchVintage: 2005Condition: UsedLast Verified2 days agoLAM RESEARCH CORPORATION
2300 EXELAN
Dry / Plasma EtchVintage: Condition: UsedLast Verified15 days ago
LAM RESEARCH CORPORATION
2300 EXELAN
Dry / Plasma EtchVintage: Condition: UsedLast Verified15 days agoLAM RESEARCH CORPORATION
2300 EXELAN
Dry / Plasma EtchVintage: Condition: UsedLast Verified15 days agoLAM RESEARCH CORPORATION
2300 EXELAN
Dry / Plasma EtchVintage: 2004Condition: UsedLast VerifiedOver 60 days ago