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RAINBOW 4620
Category
Dry / Plasma EtchOverview
The LAM Rainbow 4620 is a Etchers & Ashers system. The Rainbow 4620 can be used with 8” wafer sizes. Its installation type is a Bulkhead mount configuration. The LAM Rainbow 4620 has a Cassette Interface with Hine 38A Wafer Indexers Ergo-Loader Option and Dual Endpoint Detection.
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