Description
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ICP dry etching machineOEM Model Description
The Maxis-300LCH is a state-of-the-art ICP etcher from GigaLane, renowned for dominating the global market in PSS processing technology since 2012. Designed to enhance the light extraction efficiency of LED chips, this equipment boasts exceptional pattern uniformity and a high aspect ratio, along with a variety of etching patterns. It offers a broad process window and advanced particle control, catering to the latest LED industry trends, including flip-chip packaging. The Maxis-300LCH, pivotal for the PSS process, is versatile enough to handle additional etching processes like GaN and Oxide etch. GigaLane ensures rapid technological support through its in-house DEMO lab, fully equipped for lithography, rinsing, and process analysis in a clean-room setting.Documents
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GIGALANE
MAXIS-300LCH
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
88436
Wafer Sizes:
Unknown
Vintage:
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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GIGALANE
MAXIS-300LCH
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
88436
Wafer Sizes:
Unknown
Vintage:
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
ICP dry etching machineOEM Model Description
The Maxis-300LCH is a state-of-the-art ICP etcher from GigaLane, renowned for dominating the global market in PSS processing technology since 2012. Designed to enhance the light extraction efficiency of LED chips, this equipment boasts exceptional pattern uniformity and a high aspect ratio, along with a variety of etching patterns. It offers a broad process window and advanced particle control, catering to the latest LED industry trends, including flip-chip packaging. The Maxis-300LCH, pivotal for the PSS process, is versatile enough to handle additional etching processes like GaN and Oxide etch. GigaLane ensures rapid technological support through its in-house DEMO lab, fully equipped for lithography, rinsing, and process analysis in a clean-room setting.Documents
No documents