Description
Configured for 6" Wafers Standard Chuck LAM RESEARCH 13.56 MHz RF Power Source MKS Type 651 Pressure Controller UNIT Model UPC 1300 – HE 50 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 100 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 500 sccm Software Version V3.11Configuration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents
DRYTEK
384T
Verified
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
19861
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DRYTEK
384T
CATEGORY
Dry / Plasma Etch
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
19861
Wafer Sizes:
Unknown
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Configured for 6" Wafers Standard Chuck LAM RESEARCH 13.56 MHz RF Power Source MKS Type 651 Pressure Controller UNIT Model UPC 1300 – HE 50 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 100 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 500 sccm Software Version V3.11Configuration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents