Description
No descriptionConfiguration
No ConfigurationOEM Model Description
Alcan (Canon): APEX single-chamber etch system. Helicon wave source licensed from Plasma and Materials Technology (MORI source), metal etch, poly etch.Documents
No documents
CANON
APEX
CATEGORY
Dry / Plasma Etch
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
150464
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
Alcan (Canon): APEX single-chamber etch system. Helicon wave source licensed from Plasma and Materials Technology (MORI source), metal etch, poly etch.Documents
No documents