Marketplace > Dry / Plasma Etch > ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA (AMEC) > Primo AD-RIE-e
Primo AD-RIE-e
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Dry / Plasma EtchOverview
Primo AD-RIE-e is configured with step-by-step temperature control 4-zone dynamic ESC, which helps improve etch uniformity and selectivity with wider process window.
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