Applied Materials is committed to accelerating this new PPACt playbook for our customers and partners. We have the broadest and deepest portfolio of products for delivering PPACt innovations to the market. This portfolio encompasses the ability to create and deposit, shape and remove, modify, analyze, and connect materials and devices in new ways. We are unique in having a broad suite of process technology and metrology capabilities under one roof, and we have highly differentiated silicon and packaging lab capabilities. Our Integrated Materials Solutions co-optimize materials deposition, removal, modification, and analysis to create new materials and engineer new structures for high-performance, low-power chips at leading-edge nodes.

APPLIED MATERIALS (AMAT)

Well-established in logic, memory, and foundry fabs worldwide, eMAX provides this extensive installed base with extendibility of a proven chamber.For next generation applications, optional hardware refinements (dual-zone gas feed, multiple RF frequencies, and enhanced pumping capability) produce higher etch rates, improved uniformity, and tighter profile control while eliminating wafer-edge effects.  To balance selectivity versus etch capability, especially for high aspect ratio etch, eMAX operates in a low pressure/high gas flow regime complemented by process chemistries specifically tailored to optimize resist and baselayer selectivities.Rapid wafer handling, high etch rates, and four-chamber capabilities translate into high productivity.  Effective polymer deposition management through temperature controls and plasma confinement facilitates extended production runs.  Longer mean time between cleans (>150 RF hours), high system throughput, 90%+ up time, and low consumables costs combine to create a production-proven, reliable, cost-effective etch system.

EMAX CT+ CHAMBER

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APPLIED MATERIALS (AMAT)

EMAX CT+ CHAMBER

Dry / Plasma Etch

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APPLIED MATERIALS (AMAT)

EMAX CT+ CHAMBER

APPLIED MATERIALS (AMAT)

EMAX CT+ CHAMBER

APPLIED MATERIALS (AMAT)

EMAX CT+ CHAMBER

APPLIED MATERIALS (AMAT)

EMAX CT+ CHAMBER

EMAX CT+ CHAMBER

Dry / Plasma Etch

Similar Listings

APPLIED MATERIALS (AMAT)

EMAX CT+ CHAMBER

APPLIED MATERIALS (AMAT)

EMAX CT+ CHAMBER

APPLIED MATERIALS (AMAT)

EMAX CT+ CHAMBER

APPLIED MATERIALS (AMAT)

EMAX CT+ CHAMBER