APPLIED MATERIALS (AMAT) CENTURA AP EMAX

Description

Dielectric Etch

Configuration

Process: CUOX STANDARD SPECIFICATIONS Software Revision : VERSION 2.3_43 FI Software: B4.3_11 GEM SEC Revision: B6.10_20 Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch Carrier: FOUP (Comply with SEMI E47.1 (25wafers)) Load Port: 3 Loadport Facility plate: N2 Regulator : Supplied by IMI in floor, CDA regulator 125 PSI onboard SMC pressure switch Facility plate: Manual Valve : Supplied by IMI in floor Facility plate: Pressure Gauge Loader Module Corrosion Prevention: TDK Corrosion Resistant Loadlock Pressure Monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187 Transfer Pressure monitor: GAUGE CONVECTRON 1MTORR-1000TORR 1/4FVCR DNET, 3310-01187 Transfer Pressure monitor: 5 SLM N2 MFC, software regulated, 3030-14249 Signal Tower: KIT, 4 LIGHT, DEVICENET LIGHT TOWER EMO: Front x3, Rear x4 Cable Length: Monitor 1/2 cables : 15 ft/50ft Cable Length: Pump Cable : 75 ft Monitor: Monitor-1 : Flat Panel with Keyboard on STAND Monitor: Monitor-2 : Remote Flat Panel on STAND IPUP: Alcatel IPUP HARDWARE CONFIGURATION Chamber type: CT CHAMBER CONFIGURATION Process kits : Qt/Si Gas inject : 3.5 anodized SGD chamber O-ring: chamraz513 Turbo pump: Dual Alcatel 1600 RF match: DAIHEN RF generator: ENI GHW 50 EPD windows: Quick remove released quartz CM Test port: 1/2 VCR&KF25 Dual RGA Port: RGA port W mech valve Endpoint Type: H.O.T ENDPOINT Endpoint Wavelength 1: CO 484 NM Endpoint Wavelength 2: CN 387 NM Cathode Temperature Monitor: YES ESC Power Supply: CT HV POWER SUPPLY RF Feed: DIRECT CT CATHODE Dry pump: EABARA-ESR80WN Wall chiller: SMC-H2010 Cathode chiller: SMC-INR 496-003D Coolant: HT110 ESC type: ESC, ASSY, 300MM ,DUAL ELECTRODE,IA Liner: CT LINER Gas Box Configuration Gas Name: MFC Type-Size C4F6: FC-PN980CR1BA-150 CH2F2: FC-PN980CR1BA-50 C4F8: FC-PN980CR1BA-50 N2: FC-PN980CR1BA-200 CHF3: FC-PN980CR1BA-100 CHF3_200: FC-PN980CR1BA-200 O2_30: FC-PN980CR1BA-30 O2_200: FC-PN980CR1BA-200 O2_2000: FC-PN980CR1BA-2000 CF4: FC-PN980CR1BA-200 AR_200: FC-PN980CR1BA-200 AR_1500: FC-DN780C-BA-1500 Damage/Missing parts list Dry pumps and customer provided items not included on sales