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TEL / TOKYO ELECTRON ALPHA(α)-303i
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    TEL / TOKYO ELECTRON

    ALPHA(α)-303i

    Created: February 3, 2021

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    Last Verified: Over 60 days ago

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    Key Item Details

    Condition: As Is

    Product ID: 31426

    Wafer Sizes:

    Vintage: 2010

    Description

    Chamber (5) Zones. Details Attached.

    Configuration

    FNC Top PIO I/F connection OHT / Automated material handling system PGV Operation Gas box top / Equipment host I/F connection AGC / Group controller External input / Out table, 2 I/F Comply with GJG host communications FTP Waves Indicator Low pressure 750 / Process temperature N2 Purge system Type: 2 Boat operation RF(OP), Carrier ID reader writer type OMRON / V700-L21 560A Furnace temperature controller Integrated gas system Stainless steel / Electrical polish, tubing Tubing bends Tube heating (Vacuum line included) FUJIKIN / Manual valve FUJIKIN / Air-Operation Valve MYKROLIS (Ni) / Filter CKD / Regulator HORIBA STEC / DIGITAL / MFC (Gas panel) NAGANO / Press transducer Soft backfill injector Manifold heater Liquid source vapor system Liquid source auto backfill Auto-refill tubing interconnect 2192-352085-01 Gas system, spare parts Vacuum exhaust system, 3" 1800HTX Pump EDWARDS / Pump TEL / N2 Gas panel Pump FNC Vac CKD VEC Vaccum pressure controller Capacitance, manometer CKD-VEC / Main valve Pipe trap Wafer type: 300 SEMI STD-Notch Wafer notch: Aligner FOUP / (25) Slots ENTEGRIS AF3CWAB20BUAFW (16) / Carrier storage W/T Wafer I/F speed (U/D) Edge grip / A12O3 (STD) Wafer loading / Unloading sequence Cap heater (100) Production wafers Boat material: SiC Boat type: (141) Slots loader Boat rotation Type: Quartz / Pedestal QUARTZ / Outer / Inner tube material Straight / Liner tube Outer tube interior wall type (For CVD) / Process Tube O-ring seal / Tube sealing QUARTZ / - TEL / QUARTZ / - TEL / SIC / - WAVES / System controller Front operation panel Front MMI and gas flowchart (4) Colors / Signal tower / Close Pressure display unit SI (Pa) / Gas cabinet exhaust display unit M560A Phase / Furnace temperature controller TEL / Gas detector RIKEN / Gas detector NH3-Gas box / Gas SiH2CL2-Gas box / Gas (10) / Gases 208VAC / Voltage, 3 Phase 120VAC / Voltage, Single Phase Control power UPS UPS UPS Input voltage / Output voltage Power box top / Power input Downstairs / Power box Rapid cooling unit UPS Input voltage / Output voltage Downstairs / Pump unit - / 2105-220822-11 / QUARTZ / Outer tube - / 2105-322615-11 / QUARTZ / Inner tube - / 1105-401704-51 / QUARTZ / Injector - / 1187-182977-11 / QUARTZ / Injector (SBI) - / 2105-420544-51 / QUARTZ / N2 Injector - / 2105-220855-51 / QUARTZ / Manifold heater - / 2105-120893-11 / SiC / Boat - / 2105-220825-51 / QUARTZ / Pedestal base - / 2105-321162-11 / QUARTZ / Fin (A) - / 2105-321184-11 / QUARTZ / Fin (B) - / 2105-220853-51 / QUARTZ / Cap cover - / 1105-302154-61 / QUARTZ / Shutter HV1~10 / Hand valve HV11-15 / Hand valve F1,6,7 / Filter F2~5,8,9 / Filter RG1 / Regulator RG2,5,6 / Regulator PT1~7 / Pressure transducer PT1~7 / Digital panel meter MFC-NR Mass flow controller MFC-NX,N1 Mass flow controller MFC-NY,N3 Mass flow controller MFC-N2 Mass flow controller MFC-M1Mass flow controller MFC-M2 Mass flow controller MFC-D1 Mass flow controller MFC-J1 Mass flow controller MFM-D1 Mass flow meter NX2,N12 Air operation valve NY2,N22,32,NR2 / Air operation valve M11,21,D11,Z11,Z21,J11 Air operation valve M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 Air operation valve M15,25,D15,Z15,Z25,J15 Air operation valve (9) / Check valves RG7,BV1 / Regulator unit RG8,BV2 / Regulator unit RG9 / Regulator unit P.SW1,2,14 / Pressure switch F10 / Filter NR3 / Air operation valve OF1 / Orifice IV1 Air operation valve IV7 Air operation valve IV2 Air operation valve (2) / VV1 Air operation valves Vv2 Air operation valve MV Cylinder valve NV2 Needle valve (2) / CV25 Check valves VG1 Capacitance manometer VG2 Capacitance manometer VG3 Capacitance manometer Pressure switch MBP/DP / Dry pump unit B21 Ball valve F21-22 Filter RG21-22 Regulator PG21-22 Pressure gauge NL,LA1,2 Flow controllor FM NFS,NFA Flow meter LA3,PB1 Air operation valve BV22 Ball valve RG23 Regulator P.SW21 Pressure switch F423,24 Filter (1) / 2105-220822-11 / 2105-322615-11 / - (2) / 1105-401704-51 / - (1) / 2105-420544-51 / - (1) / 1187-182977-11 / - (1) / 1105-302154-61 / - (1) / 2105-120893-11 / - (1) / 2105-220853-51 / - (2) / 2105-321162-11 / (1) / 2105-321184-11 / (1) / 2105-220853-51 / (10) / FUJIKIN / FUDDFL-21-6.35 UGF-APD / HV1-109 (5) / FUJIKIN / FUSDALT-21-6.35 UGF x 6.35JR-DWX / H11-H15/ - (3) / ENTEGRIS / WG3SS2WW2 / F1,6,7 / - (6) / ENTEGRIS / WG3SS1WW2 / F2~5,8,9 / - (1) / CKD / PGM-H-60-4-1 / RG1 / - (3) / CKD / PGM-50-4-1 / RG2,5,6 / - (7) / NAGANO KEIKI / ZT15-Z20-17110(-0.1~0.5Mpa) / PT1~7 / - (7) / ASAHIKEIKI / "AM215A2A1170CGM(-0.1~0.5 Mpa)" / PT1~7 / - (1) / STEC / SEC-Z522BMGXC-24W2 N2 50SLM / MFC-N1 / - (1) / STEC / SEC-Z522BMGXC-24W2 N2 50SLM / MFC-NX / - (1) / STEC / SEC-Z512MGXC-24W2 N2 1SLM / MFC-NY / - (1) / STEC / SEC-Z512MGXC-24W2 NH3 200SCCM / MFC-M1 / - (1) / STEC / SEC-Z512MGXC-24W2 NH3 2SLM / MFC-M2 / - (1) / STEC / SEC-Z512MGXC-24W2 SiH2Cl2 200SCCM / MFC-D1 / - (1) / STEC / SEC-Z512MGXC-24W2 N2O 500SCCM / MFC-J1 / - (1) / STEC / SEC-Z512MGXC-24W2 N2 1SLM / MFC-N3 / - (1) / STEC / SEC-Z512MGXC-24W2 N2 10SLM / MFC-N2 / - (2) / FUJIKIN / FPR-UDDFA-21-6.35UGF-APD / NX2,N12 / - (4) / FUJIKIN / FPR-SDA-21-6.35UGF-ADP / NY2,N22,32,NR2 / - (6) / FUJIKIN / FBSDAL-RS20-6.35UGF-2B3-DVD / M11,21,D11,Z11,Z21,J11 / - (6) / FUJIKIN / FBSDAL-6.35UGF-2B3-DVD / M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 / - (6) / FUJIKIN / FBSDAL-RS2-6.35UGF-1B3-CKP / M15,25,D15,Z15,Z25,J15 / - (1) / STEC / SEC-Z512MGXC-24W2 N2 50SCCM / MFC-NR / - (1) / MOTT / GSG-V4-1-N / F10 / - (1) / FUJIKIN / FPR-SD-71-6.35 / NR3 / - (1) / FUJIKIN / FPR-71-RS1-9.52-PA / IV1 / - (1) / FUJIKIN / FPR-71-RS1-9.52-PA-BR / IV7 / - (1) / FUJIKIN / FP-71RS1-6.35-PA / IV2 / - (1) / FUJIKIN / FPR-71-9.52-2-PA-BR / VV1 / - (1) / FUJIKIN / FPR-71-9.52--PA / VV2 / - (1) / KITZ / IC8-3/1-VUA-48 / CV25 / - (1) / FUJIKIN / FUBFN-71-6.35-DFZ / NV2 / - (1) / CKD / VEC-SH8G-X0101 / MV / - (1) / MKS / 631C13T8FHBB / VG2 / - (1) / MKS / 223B-22809 / P.SW11 / - (1) / EDWARDS / IH1800HTX / MBP/DP / - (1) / SMC / AC26X-02-X2117 / RG7, BV1 / - (1) / SMC / AC26X-02-X2116 / RG8, BV2 / - (1) / SMC / AR25-02B / RG9 / - (3) / KEYENCE / AP-33PA / P.SW1,2,14 / - (1) / IHARA / G-353219-3/4 / B21 / - (2) / NIPPON SEISEN / GF-D50L / F21-22 / - (2) / CKD / RC2000-X0005 / RG21-22 / - (2) / CKD / G49D-6-P10-P9 / PG21-22 / - (1) / CKD / KHT-X0062-FL362759 / NL,LA1,2 / - (2) / KOFLOC / RK2006CKD-FC301874 / FM NFS,NFA / - (2) / CKD / ADG11V-4S / LA3, PB1 / - (2) / ENTEGRIS / WGMXMBSS3 / F23,24 / - (1) / IHARA / G-353219-1/4 / BV22 / - (1) / CKD / 2619-1C-N-P90 / RG23 / (1) / CKD / PPD3-R10P-6B / P.SW21 / E249-000003-11 / - / Display, liquid crystal UT3-TLN21-D EC49-000004-11 / - / Display, liquid crystal UT3-TLN20-B 5112-000020-11 / - / Controller, pressure VEC-C8-X101R 1181-000736-12 / - / MC-31267 MMI Power board 2187-421641-11 / - / PART VG(1) 631C11T8FHBB 040-002612-1 / - / Motor driver D207F-A1-1 040-002613-1 / - / Motor driver D207-A1-1 040-002614-1 / - / Motor driver D214-A1-1 2140-000007-11 / - / Motor driver MSDA021A2A15 2140-000008-11 / - / Motor driver MSDA021A2A18 SEMI S2-0706 CE Marked

    OEM Model Description

    ALPHA-303i is 300mm batch thermal processing system equipped functions from the high technology that is cultivated with ALPHA-8SE.

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