Description
Chamber (5) Zones. Details Attached.Configuration
FNC Top PIO I/F connection OHT / Automated material handling system PGV Operation Gas box top / Equipment host I/F connection AGC / Group controller External input / Out table, 2 I/F Comply with GJG host communications FTP Waves Indicator Low pressure 750 / Process temperature N2 Purge system Type: 2 Boat operation RF(OP), Carrier ID reader writer type OMRON / V700-L21 560A Furnace temperature controller Integrated gas system Stainless steel / Electrical polish, tubing Tubing bends Tube heating (Vacuum line included) FUJIKIN / Manual valve FUJIKIN / Air-Operation Valve MYKROLIS (Ni) / Filter CKD / Regulator HORIBA STEC / DIGITAL / MFC (Gas panel) NAGANO / Press transducer Soft backfill injector Manifold heater Liquid source vapor system Liquid source auto backfill Auto-refill tubing interconnect 2192-352085-01 Gas system, spare parts Vacuum exhaust system, 3" 1800HTX Pump EDWARDS / Pump TEL / N2 Gas panel Pump FNC Vac CKD VEC Vaccum pressure controller Capacitance, manometer CKD-VEC / Main valve Pipe trap Wafer type: 300 SEMI STD-Notch Wafer notch: Aligner FOUP / (25) Slots ENTEGRIS AF3CWAB20BUAFW (16) / Carrier storage W/T Wafer I/F speed (U/D) Edge grip / A12O3 (STD) Wafer loading / Unloading sequence Cap heater (100) Production wafers Boat material: SiC Boat type: (141) Slots loader Boat rotation Type: Quartz / Pedestal QUARTZ / Outer / Inner tube material Straight / Liner tube Outer tube interior wall type (For CVD) / Process Tube O-ring seal / Tube sealing QUARTZ / - TEL / QUARTZ / - TEL / SIC / - WAVES / System controller Front operation panel Front MMI and gas flowchart (4) Colors / Signal tower / Close Pressure display unit SI (Pa) / Gas cabinet exhaust display unit M560A Phase / Furnace temperature controller TEL / Gas detector RIKEN / Gas detector NH3-Gas box / Gas SiH2CL2-Gas box / Gas (10) / Gases 208VAC / Voltage, 3 Phase 120VAC / Voltage, Single Phase Control power UPS UPS UPS Input voltage / Output voltage Power box top / Power input Downstairs / Power box Rapid cooling unit UPS Input voltage / Output voltage Downstairs / Pump unit - / 2105-220822-11 / QUARTZ / Outer tube - / 2105-322615-11 / QUARTZ / Inner tube - / 1105-401704-51 / QUARTZ / Injector - / 1187-182977-11 / QUARTZ / Injector (SBI) - / 2105-420544-51 / QUARTZ / N2 Injector - / 2105-220855-51 / QUARTZ / Manifold heater - / 2105-120893-11 / SiC / Boat - / 2105-220825-51 / QUARTZ / Pedestal base - / 2105-321162-11 / QUARTZ / Fin (A) - / 2105-321184-11 / QUARTZ / Fin (B) - / 2105-220853-51 / QUARTZ / Cap cover - / 1105-302154-61 / QUARTZ / Shutter HV1~10 / Hand valve HV11-15 / Hand valve F1,6,7 / Filter F2~5,8,9 / Filter RG1 / Regulator RG2,5,6 / Regulator PT1~7 / Pressure transducer PT1~7 / Digital panel meter MFC-NR Mass flow controller MFC-NX,N1 Mass flow controller MFC-NY,N3 Mass flow controller MFC-N2 Mass flow controller MFC-M1Mass flow controller MFC-M2 Mass flow controller MFC-D1 Mass flow controller MFC-J1 Mass flow controller MFM-D1 Mass flow meter NX2,N12 Air operation valve NY2,N22,32,NR2 / Air operation valve M11,21,D11,Z11,Z21,J11 Air operation valve M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 Air operation valve M15,25,D15,Z15,Z25,J15 Air operation valve (9) / Check valves RG7,BV1 / Regulator unit RG8,BV2 / Regulator unit RG9 / Regulator unit P.SW1,2,14 / Pressure switch F10 / Filter NR3 / Air operation valve OF1 / Orifice IV1 Air operation valve IV7 Air operation valve IV2 Air operation valve (2) / VV1 Air operation valves Vv2 Air operation valve MV Cylinder valve NV2 Needle valve (2) / CV25 Check valves VG1 Capacitance manometer VG2 Capacitance manometer VG3 Capacitance manometer Pressure switch MBP/DP / Dry pump unit B21 Ball valve F21-22 Filter RG21-22 Regulator PG21-22 Pressure gauge NL,LA1,2 Flow controllor FM NFS,NFA Flow meter LA3,PB1 Air operation valve BV22 Ball valve RG23 Regulator P.SW21 Pressure switch F423,24 Filter (1) / 2105-220822-11 / 2105-322615-11 / - (2) / 1105-401704-51 / - (1) / 2105-420544-51 / - (1) / 1187-182977-11 / - (1) / 1105-302154-61 / - (1) / 2105-120893-11 / - (1) / 2105-220853-51 / - (2) / 2105-321162-11 / (1) / 2105-321184-11 / (1) / 2105-220853-51 / (10) / FUJIKIN / FUDDFL-21-6.35 UGF-APD / HV1-109 (5) / FUJIKIN / FUSDALT-21-6.35 UGF x 6.35JR-DWX / H11-H15/ - (3) / ENTEGRIS / WG3SS2WW2 / F1,6,7 / - (6) / ENTEGRIS / WG3SS1WW2 / F2~5,8,9 / - (1) / CKD / PGM-H-60-4-1 / RG1 / - (3) / CKD / PGM-50-4-1 / RG2,5,6 / - (7) / NAGANO KEIKI / ZT15-Z20-17110(-0.1~0.5Mpa) / PT1~7 / - (7) / ASAHIKEIKI / "AM215A2A1170CGM(-0.1~0.5 Mpa)" / PT1~7 / - (1) / STEC / SEC-Z522BMGXC-24W2 N2 50SLM / MFC-N1 / - (1) / STEC / SEC-Z522BMGXC-24W2 N2 50SLM / MFC-NX / - (1) / STEC / SEC-Z512MGXC-24W2 N2 1SLM / MFC-NY / - (1) / STEC / SEC-Z512MGXC-24W2 NH3 200SCCM / MFC-M1 / - (1) / STEC / SEC-Z512MGXC-24W2 NH3 2SLM / MFC-M2 / - (1) / STEC / SEC-Z512MGXC-24W2 SiH2Cl2 200SCCM / MFC-D1 / - (1) / STEC / SEC-Z512MGXC-24W2 N2O 500SCCM / MFC-J1 / - (1) / STEC / SEC-Z512MGXC-24W2 N2 1SLM / MFC-N3 / - (1) / STEC / SEC-Z512MGXC-24W2 N2 10SLM / MFC-N2 / - (2) / FUJIKIN / FPR-UDDFA-21-6.35UGF-APD / NX2,N12 / - (4) / FUJIKIN / FPR-SDA-21-6.35UGF-ADP / NY2,N22,32,NR2 / - (6) / FUJIKIN / FBSDAL-RS20-6.35UGF-2B3-DVD / M11,21,D11,Z11,Z21,J11 / - (6) / FUJIKIN / FBSDAL-6.35UGF-2B3-DVD / M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 / - (6) / FUJIKIN / FBSDAL-RS2-6.35UGF-1B3-CKP / M15,25,D15,Z15,Z25,J15 / - (1) / STEC / SEC-Z512MGXC-24W2 N2 50SCCM / MFC-NR / - (1) / MOTT / GSG-V4-1-N / F10 / - (1) / FUJIKIN / FPR-SD-71-6.35 / NR3 / - (1) / FUJIKIN / FPR-71-RS1-9.52-PA / IV1 / - (1) / FUJIKIN / FPR-71-RS1-9.52-PA-BR / IV7 / - (1) / FUJIKIN / FP-71RS1-6.35-PA / IV2 / - (1) / FUJIKIN / FPR-71-9.52-2-PA-BR / VV1 / - (1) / FUJIKIN / FPR-71-9.52--PA / VV2 / - (1) / KITZ / IC8-3/1-VUA-48 / CV25 / - (1) / FUJIKIN / FUBFN-71-6.35-DFZ / NV2 / - (1) / CKD / VEC-SH8G-X0101 / MV / - (1) / MKS / 631C13T8FHBB / VG2 / - (1) / MKS / 223B-22809 / P.SW11 / - (1) / EDWARDS / IH1800HTX / MBP/DP / - (1) / SMC / AC26X-02-X2117 / RG7, BV1 / - (1) / SMC / AC26X-02-X2116 / RG8, BV2 / - (1) / SMC / AR25-02B / RG9 / - (3) / KEYENCE / AP-33PA / P.SW1,2,14 / - (1) / IHARA / G-353219-3/4 / B21 / - (2) / NIPPON SEISEN / GF-D50L / F21-22 / - (2) / CKD / RC2000-X0005 / RG21-22 / - (2) / CKD / G49D-6-P10-P9 / PG21-22 / - (1) / CKD / KHT-X0062-FL362759 / NL,LA1,2 / - (2) / KOFLOC / RK2006CKD-FC301874 / FM NFS,NFA / - (2) / CKD / ADG11V-4S / LA3, PB1 / - (2) / ENTEGRIS / WGMXMBSS3 / F23,24 / - (1) / IHARA / G-353219-1/4 / BV22 / - (1) / CKD / 2619-1C-N-P90 / RG23 / (1) / CKD / PPD3-R10P-6B / P.SW21 / E249-000003-11 / - / Display, liquid crystal UT3-TLN21-D EC49-000004-11 / - / Display, liquid crystal UT3-TLN20-B 5112-000020-11 / - / Controller, pressure VEC-C8-X101R 1181-000736-12 / - / MC-31267 MMI Power board 2187-421641-11 / - / PART VG(1) 631C11T8FHBB 040-002612-1 / - / Motor driver D207F-A1-1 040-002613-1 / - / Motor driver D207-A1-1 040-002614-1 / - / Motor driver D214-A1-1 2140-000007-11 / - / Motor driver MSDA021A2A15 2140-000008-11 / - / Motor driver MSDA021A2A18 SEMI S2-0706 CE MarkedOEM Model Description
The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.Documents
TEL / TOKYO ELECTRON
ALPHA(α)-303i
Verified
CATEGORY
Furnaces / Diffusion
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
31426
Wafer Sizes:
Unknown
Vintage:
2010
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TEL / TOKYO ELECTRON
ALPHA(α)-303i
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
31426
Wafer Sizes:
Unknown
Vintage:
2010
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Chamber (5) Zones. Details Attached.Configuration
FNC Top PIO I/F connection OHT / Automated material handling system PGV Operation Gas box top / Equipment host I/F connection AGC / Group controller External input / Out table, 2 I/F Comply with GJG host communications FTP Waves Indicator Low pressure 750 / Process temperature N2 Purge system Type: 2 Boat operation RF(OP), Carrier ID reader writer type OMRON / V700-L21 560A Furnace temperature controller Integrated gas system Stainless steel / Electrical polish, tubing Tubing bends Tube heating (Vacuum line included) FUJIKIN / Manual valve FUJIKIN / Air-Operation Valve MYKROLIS (Ni) / Filter CKD / Regulator HORIBA STEC / DIGITAL / MFC (Gas panel) NAGANO / Press transducer Soft backfill injector Manifold heater Liquid source vapor system Liquid source auto backfill Auto-refill tubing interconnect 2192-352085-01 Gas system, spare parts Vacuum exhaust system, 3" 1800HTX Pump EDWARDS / Pump TEL / N2 Gas panel Pump FNC Vac CKD VEC Vaccum pressure controller Capacitance, manometer CKD-VEC / Main valve Pipe trap Wafer type: 300 SEMI STD-Notch Wafer notch: Aligner FOUP / (25) Slots ENTEGRIS AF3CWAB20BUAFW (16) / Carrier storage W/T Wafer I/F speed (U/D) Edge grip / A12O3 (STD) Wafer loading / Unloading sequence Cap heater (100) Production wafers Boat material: SiC Boat type: (141) Slots loader Boat rotation Type: Quartz / Pedestal QUARTZ / Outer / Inner tube material Straight / Liner tube Outer tube interior wall type (For CVD) / Process Tube O-ring seal / Tube sealing QUARTZ / - TEL / QUARTZ / - TEL / SIC / - WAVES / System controller Front operation panel Front MMI and gas flowchart (4) Colors / Signal tower / Close Pressure display unit SI (Pa) / Gas cabinet exhaust display unit M560A Phase / Furnace temperature controller TEL / Gas detector RIKEN / Gas detector NH3-Gas box / Gas SiH2CL2-Gas box / Gas (10) / Gases 208VAC / Voltage, 3 Phase 120VAC / Voltage, Single Phase Control power UPS UPS UPS Input voltage / Output voltage Power box top / Power input Downstairs / Power box Rapid cooling unit UPS Input voltage / Output voltage Downstairs / Pump unit - / 2105-220822-11 / QUARTZ / Outer tube - / 2105-322615-11 / QUARTZ / Inner tube - / 1105-401704-51 / QUARTZ / Injector - / 1187-182977-11 / QUARTZ / Injector (SBI) - / 2105-420544-51 / QUARTZ / N2 Injector - / 2105-220855-51 / QUARTZ / Manifold heater - / 2105-120893-11 / SiC / Boat - / 2105-220825-51 / QUARTZ / Pedestal base - / 2105-321162-11 / QUARTZ / Fin (A) - / 2105-321184-11 / QUARTZ / Fin (B) - / 2105-220853-51 / QUARTZ / Cap cover - / 1105-302154-61 / QUARTZ / Shutter HV1~10 / Hand valve HV11-15 / Hand valve F1,6,7 / Filter F2~5,8,9 / Filter RG1 / Regulator RG2,5,6 / Regulator PT1~7 / Pressure transducer PT1~7 / Digital panel meter MFC-NR Mass flow controller MFC-NX,N1 Mass flow controller MFC-NY,N3 Mass flow controller MFC-N2 Mass flow controller MFC-M1Mass flow controller MFC-M2 Mass flow controller MFC-D1 Mass flow controller MFC-J1 Mass flow controller MFM-D1 Mass flow meter NX2,N12 Air operation valve NY2,N22,32,NR2 / Air operation valve M11,21,D11,Z11,Z21,J11 Air operation valve M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 Air operation valve M15,25,D15,Z15,Z25,J15 Air operation valve (9) / Check valves RG7,BV1 / Regulator unit RG8,BV2 / Regulator unit RG9 / Regulator unit P.SW1,2,14 / Pressure switch F10 / Filter NR3 / Air operation valve OF1 / Orifice IV1 Air operation valve IV7 Air operation valve IV2 Air operation valve (2) / VV1 Air operation valves Vv2 Air operation valve MV Cylinder valve NV2 Needle valve (2) / CV25 Check valves VG1 Capacitance manometer VG2 Capacitance manometer VG3 Capacitance manometer Pressure switch MBP/DP / Dry pump unit B21 Ball valve F21-22 Filter RG21-22 Regulator PG21-22 Pressure gauge NL,LA1,2 Flow controllor FM NFS,NFA Flow meter LA3,PB1 Air operation valve BV22 Ball valve RG23 Regulator P.SW21 Pressure switch F423,24 Filter (1) / 2105-220822-11 / 2105-322615-11 / - (2) / 1105-401704-51 / - (1) / 2105-420544-51 / - (1) / 1187-182977-11 / - (1) / 1105-302154-61 / - (1) / 2105-120893-11 / - (1) / 2105-220853-51 / - (2) / 2105-321162-11 / (1) / 2105-321184-11 / (1) / 2105-220853-51 / (10) / FUJIKIN / FUDDFL-21-6.35 UGF-APD / HV1-109 (5) / FUJIKIN / FUSDALT-21-6.35 UGF x 6.35JR-DWX / H11-H15/ - (3) / ENTEGRIS / WG3SS2WW2 / F1,6,7 / - (6) / ENTEGRIS / WG3SS1WW2 / F2~5,8,9 / - (1) / CKD / PGM-H-60-4-1 / RG1 / - (3) / CKD / PGM-50-4-1 / RG2,5,6 / - (7) / NAGANO KEIKI / ZT15-Z20-17110(-0.1~0.5Mpa) / PT1~7 / - (7) / ASAHIKEIKI / "AM215A2A1170CGM(-0.1~0.5 Mpa)" / PT1~7 / - (1) / STEC / SEC-Z522BMGXC-24W2 N2 50SLM / MFC-N1 / - (1) / STEC / SEC-Z522BMGXC-24W2 N2 50SLM / MFC-NX / - (1) / STEC / SEC-Z512MGXC-24W2 N2 1SLM / MFC-NY / - (1) / STEC / SEC-Z512MGXC-24W2 NH3 200SCCM / MFC-M1 / - (1) / STEC / SEC-Z512MGXC-24W2 NH3 2SLM / MFC-M2 / - (1) / STEC / SEC-Z512MGXC-24W2 SiH2Cl2 200SCCM / MFC-D1 / - (1) / STEC / SEC-Z512MGXC-24W2 N2O 500SCCM / MFC-J1 / - (1) / STEC / SEC-Z512MGXC-24W2 N2 1SLM / MFC-N3 / - (1) / STEC / SEC-Z512MGXC-24W2 N2 10SLM / MFC-N2 / - (2) / FUJIKIN / FPR-UDDFA-21-6.35UGF-APD / NX2,N12 / - (4) / FUJIKIN / FPR-SDA-21-6.35UGF-ADP / NY2,N22,32,NR2 / - (6) / FUJIKIN / FBSDAL-RS20-6.35UGF-2B3-DVD / M11,21,D11,Z11,Z21,J11 / - (6) / FUJIKIN / FBSDAL-6.35UGF-2B3-DVD / M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14 / - (6) / FUJIKIN / FBSDAL-RS2-6.35UGF-1B3-CKP / M15,25,D15,Z15,Z25,J15 / - (1) / STEC / SEC-Z512MGXC-24W2 N2 50SCCM / MFC-NR / - (1) / MOTT / GSG-V4-1-N / F10 / - (1) / FUJIKIN / FPR-SD-71-6.35 / NR3 / - (1) / FUJIKIN / FPR-71-RS1-9.52-PA / IV1 / - (1) / FUJIKIN / FPR-71-RS1-9.52-PA-BR / IV7 / - (1) / FUJIKIN / FP-71RS1-6.35-PA / IV2 / - (1) / FUJIKIN / FPR-71-9.52-2-PA-BR / VV1 / - (1) / FUJIKIN / FPR-71-9.52--PA / VV2 / - (1) / KITZ / IC8-3/1-VUA-48 / CV25 / - (1) / FUJIKIN / FUBFN-71-6.35-DFZ / NV2 / - (1) / CKD / VEC-SH8G-X0101 / MV / - (1) / MKS / 631C13T8FHBB / VG2 / - (1) / MKS / 223B-22809 / P.SW11 / - (1) / EDWARDS / IH1800HTX / MBP/DP / - (1) / SMC / AC26X-02-X2117 / RG7, BV1 / - (1) / SMC / AC26X-02-X2116 / RG8, BV2 / - (1) / SMC / AR25-02B / RG9 / - (3) / KEYENCE / AP-33PA / P.SW1,2,14 / - (1) / IHARA / G-353219-3/4 / B21 / - (2) / NIPPON SEISEN / GF-D50L / F21-22 / - (2) / CKD / RC2000-X0005 / RG21-22 / - (2) / CKD / G49D-6-P10-P9 / PG21-22 / - (1) / CKD / KHT-X0062-FL362759 / NL,LA1,2 / - (2) / KOFLOC / RK2006CKD-FC301874 / FM NFS,NFA / - (2) / CKD / ADG11V-4S / LA3, PB1 / - (2) / ENTEGRIS / WGMXMBSS3 / F23,24 / - (1) / IHARA / G-353219-1/4 / BV22 / - (1) / CKD / 2619-1C-N-P90 / RG23 / (1) / CKD / PPD3-R10P-6B / P.SW21 / E249-000003-11 / - / Display, liquid crystal UT3-TLN21-D EC49-000004-11 / - / Display, liquid crystal UT3-TLN20-B 5112-000020-11 / - / Controller, pressure VEC-C8-X101R 1181-000736-12 / - / MC-31267 MMI Power board 2187-421641-11 / - / PART VG(1) 631C11T8FHBB 040-002612-1 / - / Motor driver D207F-A1-1 040-002613-1 / - / Motor driver D207-A1-1 040-002614-1 / - / Motor driver D214-A1-1 2140-000007-11 / - / Motor driver MSDA021A2A15 2140-000008-11 / - / Motor driver MSDA021A2A18 SEMI S2-0706 CE MarkedOEM Model Description
The Alpha-303i is a 300mm production tool developed by Tokyo Electron. It is the result of years of research and development, with TEL having completed their 300mm batch furnace prototype in 1995. Since then, TEL has delivered numerous atmospheric and LP CVD systems to multiple customer sites and consortia worldwide. The Alpha-303i includes key features such as a 100 product wafer load size, a high-speed multiple-wafer loading system with optical notch alignment, and a Front-Opening Unified Pod (FOUP) interface that is configurable for overhead transfer systems (OHT) and personal guided vehicles (PGV). Additionally, boat rotation is standard on all processes, and a Fast Thermal Processing System (FTP) is available for both atmospheric and CVD systems. This tool reinforces TEL’s commitment to being production ready for the 300mm era of semiconductor manufacturing.Documents
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