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    Key Item Details


    Operational Status:

    Product ID:82115

    Wafer Sizes:Unknown



    No description available


    WHS Wafer Loader Included

    No documents
    OEM Model Description

    The NSX-105 is an addition to the NSX Series, which includes the NSX-70, NSX-80, NSX-85, NSX-90 and NSX-95 models. In addition to whole wafer and film frame handling capabilities, the NSX-105 will also have 300mm wafer capability, which was introduced in 2001. This model will provide customers with a wider range of pricing and functionality options within the NSX Series.

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