The TeraScan XR system for mask shop production of reticles for the 32nm node and above and our TeraFab products for reticle defect monitoring capability for IC fabs. 

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

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TeraScan XR

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