The Candela 8520 is a surface inspection system that uses proprietary optical technology to measure scatter intensity at two angles of incidence. It detects and classifies a broad range of defects on Wide Band Gap materials including SiC and GaN, up to 200mm in diameter. It is used for substrate quality control, vendor comparison, process control, and tool monitoring in the SiC and GaN power device industries. Options include SECS-GEM, light tower, diamond scribe, calibration standards, offline software, OCR, and photoluminescence. 

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

CANDELA 8520

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