Overview

The 2401 Automated Macro Defect Inspection System is a product by KLA-Tencor that replaces manual bright light macro defect inspection performed by operators. It provides automated detection, classification, and reporting of all yield-critical macro after-develop inspection defect types, including hotspots, scratches, large particles, extra and missing resist, unexposed fields, striations, developer spots and splashback. With sensitivity superior to that of operators, the 2401 Automated Macro Defect Inspection System detects defects reliably and repeatably, allowing for quick and accurate disposition decisions, reducing scrap and preventing further investment in low-yielding wafers.