TERON SL655
Category
Defect InspectionOverview
The Teron SL655 reticle inspection system enables IC manufacturers to assess incoming reticle quality, monitor reticle degradation and detect yield-critical reticle defects. The Teron SL655 introduces new STARlightGold technology, which provides a golden reference to maximize detection of defects critical to the mask requalification process.
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