Part of Model 2900
Optics available
0.05, 0.065, 0.08, 0.09, 0.12, 0.16, 0.2, 0.22
Exposure modes
Blue Band
Broad Band UV
Deep Band UV
Middle Band UV
Ultra Broad Band
Ultra Deep Band
GH I Line
G Line
HI Line
I Line
VIS

Initialization status by assemblies
Sw 10.7.346.2
- IMC boot check : ok
- Loader init : ok
- Stage Init : ok
Optics
* Trombone init : ok
* PostMag init : ok
Illumination
- BF Aperture : ok
- DF Aperture : ok
- Field Stop : ok
- Illumination Base Temperature : ok
- Incident EF-Angle : ok
- Incident EF-InOut : ok
- Lamp House Temperature : ok
- NDFilter 1 : ok
- NDFilter 2 : ok
- Spectral wheel : ok
- Split Homogenizer : ok
IMG
- Def 2 Angle : ok
- Def 2 InOut : ok
CMO
- CMODFStop1 : ok
- CMODFStop2 : ok
- CMOPeltierDriver : ok
- CMOTemperature : ok
- CameraMirror : no
- PIO Review Switch : Ok
- RollMirror : 0k
- Zoom : ok
- ZoomTemperature : ok
AFF
- AFAperture : ok
- AFFine : ok
- AFPlateTemperature : ok

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

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KLA

2915

Defect Inspection

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