Overview

The Surfscan SP2XP is an unpatterned wafer surface quality inspection system for inspecting bare wafers and blanket films with sensitivity. This advanced wafer quality inspection system also introduces an ultra-high sensitivity operating mode to accelerate development of 3Xnm and 2Xnm next-generation devices. The Surfscan SP2XP boasts proprietary UV technology to provide high sensitivity down to 30nm defect sizes. Its optical design enables enhanced sensitivity to defects on rough films.