1 Fully Operational

Defects and Classifies:
-HDD sub-micron bits
-Bumps
-Particles
-Buried defects on metal and glass

Use Cases:
-Defect inspection
-Scratch and ridge inspection
-Particle and stain inspection
-Laser texture analysis
-Carbon uniformity analysis and carbon void inspection
-Recording layer and soft under layer mapping
-Lube uniformity analysis

KLA Candela 6100.pdf

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

The Candela OSA 6100 is a system that introduces X-Beam channel technology, which adds radial illumination to the existing circumferential illumination design. It also features advanced collection optics that extend defect sensitivity down to 80nm. This multi-channel system is capable of simultaneously detecting and classifying defects such as particles, pits, and stains. Additionally, it can characterize lubricant thickness and use the Kerr Effect to characterize magnetic imaging.

KLA

CANDELA OSA-6100

Defect Inspection

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CANDELA OSA-6100

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CANDELA OSA-6100

Defect Inspection

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CANDELA OSA-6100

KLA

CANDELA OSA-6100

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CANDELA OSA-6100