As the world's first multiple e-beam (multibeam) wafer inspection tool, the eScan 1000 delivers a massive leap forward in high-resolution wafer inspection.
The eScan 1000 is up to 600% faster than previous e-beam wafer inspection tools, thanks to its multibeam technology, high-speed wafer stages and advanced computational algorithms.

ASML to acquire HMI to enhance Holistic Lithography product portfolio.

HMI has been committed to the research and development of the most advanced E-beam Inspection (EBI) tools and solutions for the leading semiconductor manufacturing fabs. Today, HMI is the leading supplier of EBI tools for both foundry and memory fabs worldwide. Based on our proprietary electron gun and column technologies and highly effective defect inspection algorithms, we deliver multiple product lines, including eScan® Series / ePTM Series / eXplore® Series, for various R&D and production applications.

eScan 1000

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